【英文标准名称】:StandardTestMethodforIn-PlaneLengthMeasurementsofThin,ReflectingFilmsUsinganOpticalInterferometer
【原文标准名称】:用光学干涉仪测量反射薄膜共面长度的标准试验方法
【标准号】:ASTME2244-2005
【标准状态】:现行
【国别】:
【发布日期】:2005
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E08.05
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:影片;干涉仪;长度测量;光学的;摄影;刨刀;薄膜
【英文主题词】:cantilevers;combinedstandarduncertainty;deflectionmeasurements;fixed-fixedbeams;interferometry;lengthmeasurements;microelectromechanicalsystems;MEMS;polysilicon;residualstrain;straingradient;teststructure
【摘要】:In-planelengthmeasurementsareusedincalculationsofparameters,suchasresidualstrainandYoungrsquo;modulus.In-planedeflectionmeasurementsarerequiredforspecificteststructures.Parameters,includingresidualstrain,arecalculatedgiventhesein-planedeflectionmeasurements.1.1Thistestmethodcoversaprocedureformeasuringin-planelengths(includingdeflections)ofpatternedthinfilms.Itappliesonlytofilms,suchasfoundinmicroelectromechanicalsystems(MEMS)materials,whichcanbeimagedusinganopticalinterferometer.1.2Thereareotherwaystodeterminein-planelengths.Usingthedesigndimensionstypicallyprovidesmoreprecisein-planelengthvaluesthanusingmeasurementstakenwithanopticalinterferometer.(Interferometricmeasurementsaretypicallymoreprecisethanmeasurementstakenwithanopticalmicroscope.)Thistestmethodisintendedforusewheninterferometricmeasurementsarepreferredoverusingthedesigndimensions(forexample,whenmeasuringin-planedeflectionsandwhenmeasuringlengthsinanunprovenfabricationprocess).1.3Thistestmethodusesanon-contactopticalinterferometerwiththecapabilityofobtainingtopographical3-Ddatasets.Itisperformedinthelaboratory.1.4Themaximumin-planelengthmeasuredisdeterminedbythemaximumfieldofviewoftheinterferometeratthelowestmagnification.Theminimumdeflectionmeasuredisdeterminedbytheinterferometerspixel-to-pixelspacingatthehighestmagnification.Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:G81
【国际标准分类号】:37_040_20
【页数】:11P.;A4
【正文语种】: